Chih-Yang Chang

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating air-gap spacer for N7/N5 finFET and beyond
- Patent number 9,960,275
- Issue date May 1, 2018
- Applied Materials, Inc.
- Chih-Yang Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM ETCH SYSTEM AND METHOD
- Publication number 20240355597
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Chih-Yang CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE DISK WITH APERTURE FOR ETCH CONTROL
- Publication number 20230245865
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Chih-Min LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING AIR-GAP SPACER FOR N7/N5 FINFET AND BEYOND
- Publication number 20180122945
- Publication date May 3, 2018
- Applied Materials, Inc.
- Chih-Yang CHANG
- H01 - BASIC ELECTRIC ELEMENTS