Chih-Yang Chang

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating an ultra low-k dielectric self-aligned via
- Patent number 8,992,792
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Chih-Yang Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FABRICATING AN ULTRA LOW-K DIELECTRIC SELF-ALIGNED VIA
- Publication number 20140024220
- Publication date Jan 23, 2014
- Chih-Yang Chang
- H01 - BASIC ELECTRIC ELEMENTS