Chih-Yang Li

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafering method comprising a plasma etch with a gas emitting wafer...
- Patent number 6,759,341
- Issue date Jul 6, 2004
- Tru-Si Technologies, Inc.
- Chih-Yang Li
- H01 - BASIC ELECTRIC ELEMENTS