Chiharu Kido

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,671,964
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,652,748
- Issue date Jan 26, 2010
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure Apparatus and Device Manufacturing Method
- Publication number 20080246930
- Publication date Oct 9, 2008
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20060209275
- Publication date Sep 21, 2006
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY