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Chihhsiang HSIAO
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Iwate, JP
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Patents Grants
last 30 patents
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Patent Grant
Protective film forming method
Patent number
10,170,300
Issue date
Jan 1, 2019
Tokyo Electron Limited
Shogo Tsukazawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FORMING A PROTECTIVE FILM
Publication number
20170182514
Publication date
Jun 29, 2017
TOKYO ELECTRON LIMITED
Takeshi KUMAGAI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...