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Chihiro ABE
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Yokkaichi, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method, semiconductor manufacturing apparatus, and method o...
Patent number
11,651,969
Issue date
May 16, 2023
Kioxia Corporation
Chihiro Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
10,325,920
Issue date
Jun 18, 2019
TOSHIBA MEMORY CORPORATION
Chihiro Abe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD O...
Publication number
20230114349
Publication date
Apr 13, 2023
KIOXIA Corporation
Chihiro ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD O...
Publication number
20210020450
Publication date
Jan 21, 2021
Kioxia Corporation
Chihiro ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20170330890
Publication date
Nov 16, 2017
Toshiba Memory Corporation
Chihiro ABE
H01 - BASIC ELECTRIC ELEMENTS