Chihiro TAMURA

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device manufacturing method and substrate treatment s...
- Patent number 9,418,837
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Koji Akiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240304439
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20230326977
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING CONDUCTIVE MEMBER AND METHOD OF FORMING CHANNEL
- Publication number 20230086545
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor Device Manufacturing Method and Substrate Treatment S...
- Publication number 20150017813
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20140242808
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Koji Akiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...