Chii-Shing Yang

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Chin Yee alley, TW

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for cleaning a furnace torch
- Patent number 6,676,769
- Issue date Jan 13, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- June-Yie Kao
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Etching uniformity in wet bench tools
- Publication number 20030181042
- Publication date Sep 25, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jian Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for cleaning a furnace torch
- Publication number 20030084923
- Publication date May 8, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- June-Yie Kao
- B08 - CLEANING