Chikako TAKAHASHI

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrode assembly and plasma processing apparatus
- Patent number 9,520,276
- Issue date Dec 13, 2016
- Tokyo Electron Limited
- Chikako Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING APPARATUS
- Publication number 20120247678
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Chikako TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode assembly and plasma processing apparatus
- Publication number 20060288934
- Publication date Dec 28, 2006
- TOKYO ELECTRON LIMITED
- Chikako Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...