Chikako TAKATOH

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining a cleanliness of a cleaning member
- Patent number 12,101,073
- Issue date Sep 24, 2024
- Ebara Corporation
- Chikako Takatoh
- B08 - CLEANING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,242,339
- Issue date Jan 26, 2016
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...
- Publication number 20240050991
- Publication date Feb 15, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...
- Publication number 20240024928
- Publication date Jan 25, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
MACHINE LEARNING APPARATUS, SLIDING-SURFACE DIAGNOSIS APPARATUS, IN...
- Publication number 20240011821
- Publication date Jan 11, 2024
- EBARA CORPORATION
- Chikako TAKATOH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...
- Publication number 20210384881
- Publication date Dec 9, 2021
- EBARA CORPORATION
- Chikako Takatoh
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210039142
- Publication date Feb 11, 2021
- EBARA CORPORATION
- Chikako TAKATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR JUDGING POLISHING PERFORMANCE OF POLISHING...
- Publication number 20150346088
- Publication date Dec 3, 2015
- EBARA CORPORATION
- Chikako TAKATOH
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140273753
- Publication date Sep 18, 2014
- Hisanori MATSUO
- B24 - GRINDING POLISHING

Chikako TAKATOH

Person

Patents Grantslast 30 patents

Method for determining a cleanliness of a cleaning member

Polishing apparatus and polishing method

Patents Applicationslast 30 patents

CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...

METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...

MACHINE LEARNING APPARATUS, SLIDING-SURFACE DIAGNOSIS APPARATUS, IN...

METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

METHOD AND APPARATUS FOR JUDGING POLISHING PERFORMANCE OF POLISHING...

POLISHING APPARATUS AND POLISHING METHOD