Chikara Itoh

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern evaluation apparatus and a method of pattern evaluation
- Patent number 5,602,645
- Issue date Feb 11, 1997
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam pattern transfer system having an autofocusing mechanism
- Patent number 4,572,956
- Issue date Feb 25, 1986
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toru Tojo
- B82 - NANO-TECHNOLOGY