Chikara MAEDA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,302,525
- Issue date Apr 12, 2022
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,101,147
- Issue date Aug 24, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189762
- Publication date Jun 16, 2022
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210331192
- Publication date Oct 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190176179
- Publication date Jun 13, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190091736
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING