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Chin-Chong Chiang
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Hsinchu County, TW
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Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND THE CONTROLLI...
Publication number
20120070590
Publication date
Mar 22, 2012
Industrial Technology Research Institute
Jen-Rong Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...