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Hsinchu City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method of fabricating semiconductor structure
Patent number
10,964,547
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-zone gas distribution plate (GDP) and a method for designing...
Patent number
10,957,516
Issue date
Mar 23, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing microelectromechanical system structure ha...
Patent number
10,654,713
Issue date
May 19, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating semiconductor structure
Patent number
10,529,578
Issue date
Jan 7, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microelectromechanical system structure ha...
Patent number
10,273,152
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming micro-electro-mechanical system (MEMS) device st...
Patent number
10,131,539
Issue date
Nov 20, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-zone gas distribution plate (GDP) and a method for designing...
Patent number
9,997,336
Issue date
Jun 12, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han Meng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE
Publication number
20200098583
Publication date
Mar 26, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
Publication number
20190256350
Publication date
Aug 22, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE
Publication number
20190148161
Publication date
May 16, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
Publication number
20190092625
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-ZONE GAS DISTRIBUTION PLATE (GDP) AND A METHOD FOR DESIGNING...
Publication number
20180286634
Publication date
Oct 4, 2018
Taiwan Semiconductor Manufacturing Co., LTD
Chin-Han Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE ST...
Publication number
20180148324
Publication date
May 31, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Multi-Zone Gas Distribution Plate (GDP) and a Method for Designing...
Publication number
20170309500
Publication date
Oct 26, 2017
Taiwan Semiconductor Manufacturing Co., LTD
Chin-Han Meng
H01 - BASIC ELECTRIC ELEMENTS