Chin-Hsin Peng

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Dual mode hybrid control and method for CMP slurry
- Patent number 6,926,584
- Issue date Aug 9, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chao-Jung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Automatic sensing wafer blade and method for using
- Patent number 6,896,304
- Issue date May 24, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiao-Yi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry flow control and monitor system for chemical mechanical poli...
- Patent number 6,860,723
- Issue date Mar 1, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ben-Shu Chen
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Multi-phase pressure control valve for process chamber
- Patent number 6,843,264
- Issue date Jan 18, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Tien Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing assembly for a linear chemical mechanical polishing appar...
- Patent number 6,733,373
- Issue date May 11, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Ming Yang
- B24 - GRINDING POLISHING
Information Patent Grant
Dual-inverter type operating circuit for generating two AC signals...
- Patent number 5,844,375
- Issue date Dec 1, 1998
- Taiwan Chi Yi Lighting Industrial Co., Ltd.
- Tung-Hsin Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Systems and methods for temperature control of semiconductor wafers
- Publication number 20060023395
- Publication date Feb 2, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heterojunction bipolar transistor and manufacturing method making t...
- Publication number 20050085035
- Publication date Apr 21, 2005
- Chih-Chiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
[APPATAUS AND METHOD FOR SIMULATNEOUSLY PROCESSING WASTE OZONE AND...
- Publication number 20050051490
- Publication date Mar 10, 2005
- Shin-Tong Wu
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
System and method for dry chamber temperature control
- Publication number 20050016467
- Publication date Jan 27, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi - phase pressure control valve for process chamber
- Publication number 20040118464
- Publication date Jun 24, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Tien Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Slurry flow control and monitor system for chemical mechanical poli...
- Publication number 20040071555
- Publication date Apr 15, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Hsu Chen
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Dual mode hybrid control and method for CMP slurry
- Publication number 20040072503
- Publication date Apr 15, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chao-Jung Chang
- B24 - GRINDING POLISHING
Information Patent Application
Automatic sensing wafer blade and method for using
- Publication number 20040041421
- Publication date Mar 4, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- H01 - BASIC ELECTRIC ELEMENTS

Chin-Hsin Peng

Person

Patents Grantslast 30 patents

Dual mode hybrid control and method for CMP slurry

Automatic sensing wafer blade and method for using

Slurry flow control and monitor system for chemical mechanical poli...

Multi-phase pressure control valve for process chamber

Polishing assembly for a linear chemical mechanical polishing appar...

Dual-inverter type operating circuit for generating two AC signals...

Patents Applicationslast 30 patents

Systems and methods for temperature control of semiconductor wafers

Heterojunction bipolar transistor and manufacturing method making t...

[APPATAUS AND METHOD FOR SIMULATNEOUSLY PROCESSING WASTE OZONE AND...

System and method for dry chamber temperature control

Multi - phase pressure control valve for process chamber

Slurry flow control and monitor system for chemical mechanical poli...

Dual mode hybrid control and method for CMP slurry

Automatic sensing wafer blade and method for using