Chin-Jui Hsu

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Portland, OR, US

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Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION RATE ENHANCEMENT OF AMORPHOUS CARBON HARD MASK FILM BY P...
- Publication number 20230357921
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DENSITY, MODULUS, AND HARDNESS AMORPHOUS CARBON FILMS AT LOW P...
- Publication number 20220282366
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...