Chin-Tai HUNG

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Hsinchu, TW

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Patents Applicationslast 30 patents

Information Patent Application
FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL
- Publication number 20230386799
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL
- Publication number 20230066418
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng Chieh HUANG
- H01 - BASIC ELECTRIC ELEMENTS