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Shanghai, CN
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last 30 patents
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Patent Grant
Method and system for monitoring implantation of ions into semicond...
Patent number
6,844,208
Issue date
Jan 18, 2005
Semiconductor Manufacturing International (Shanghai) Corporation
Jin Ming Su
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR MONITORING IMPLANTATION OF IONS INTO SEMICOND...
Publication number
20040253752
Publication date
Dec 16, 2004
Semiconductor Manufacturing International (Shanghai) Corporation
Jin Ming Su
G01 - MEASURING TESTING