Chin-Tsan Jan

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Wafer protection system
- Patent number 7,139,641
- Issue date Nov 21, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Tsan Jan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CMP apparatus polishing head with concentric pressure zones
- Patent number 6,998,013
- Issue date Feb 14, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Tsan Jan
- B24 - GRINDING POLISHING
Information Patent Grant
Chuck rollers and pins for substrate cleaning and drying system
- Patent number 6,964,419
- Issue date Nov 15, 2005
- Taiwan Seminconductor Manufacturing Co., Ltd.
- Chin-Tsan Jan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Online tension monitor system for robot x-belt of mirra CMP
- Patent number 6,758,724
- Issue date Jul 6, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Tsan Jan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Chuck rollers and pins for substrate cleaning and drying system
- Publication number 20040195785
- Publication date Oct 7, 2004
- Taiwan Semicondutor Manufacturing Co., Ltd.
- Chin-Tsan Jan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer protection system
- Publication number 20040188018
- Publication date Sep 30, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Tsan Jan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMP apparatus polishing head with concentric pressure zones
- Publication number 20040069406
- Publication date Apr 15, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Tsan Jan
- B24 - GRINDING POLISHING
Information Patent Application
Online tension monitor system for robot X-belt of mirra CMP
- Publication number 20030128127
- Publication date Jul 10, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Tsan Jan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS