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Chin Yu Chen
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Shanghai, CN
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last 30 patents
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Patent Grant
Cellulase having improved enzymatic activity
Patent number
10,479,985
Issue date
Nov 19, 2019
HUBEI UNIVERSITY
Chun-Chi Chen
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Grant
Apparatus and method for calibrating lithography process
Patent number
9,293,354
Issue date
Mar 22, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
Chun Chi Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to prevent contamination of optical element by...
Patent number
7,701,549
Issue date
Apr 20, 2010
Semiconductor Manufacturing International (Shanghai) Corporation
Chin Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHOD FOR CALIBRATING LITHOGRAPHY PROCESS
Publication number
20110279797
Publication date
Nov 17, 2011
Semiconductor Manufacturing International (Shanghai) Corporation
CHUN CHI CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST TOOL CLEANING JIG CONFIGURED TO RECEIVE FLOW FROM TOP A...
Publication number
20110000509
Publication date
Jan 6, 2011
Semiconductor Manufacturing International (Shanghai Corporation)
Chin Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus to prevent contamination of optical element by...
Publication number
20080106708
Publication date
May 8, 2008
Semiconductor Manufacturing International (Shanghai) Corporation
Chin Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY