TREA

Ching C. Tang

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  • San Francisco, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Reactor chamber self-cleaning process
    • Patent number 4,960,488
    • Issue date Oct 2, 1990
    • Applied Materials, Inc.
    • Kam S. Law
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In-situ CVD chamber cleaner
    • Patent number 4,657,616
    • Issue date Apr 14, 1987
    • Benzing Technologies, Inc.
    • David W. Benzing
    • C30 - CRYSTAL GROWTH