Ching-Hsing Shen

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 12,074,110
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for forming the same
- Patent number 12,017,908
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for making the same
- Patent number 11,851,318
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and method for manufacturing thereof
- Patent number 11,807,520
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming dielectric and metal sealing layers on capping st...
- Patent number 11,772,960
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Layer for buffer semiconductor device including microelectromechnic...
- Patent number 11,462,478
- Issue date Oct 4, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a light emitting device and light emitting device...
- Patent number 11,417,802
- Issue date Aug 16, 2022
- Epistar Corporation
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,276,670
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High durability extreme ultraviolet photomask
- Patent number 11,003,069
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hao Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer level integrated MEMS device enabled by silicon pillar and sm...
- Patent number 10,961,118
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chia Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method for the same
- Patent number 10,961,114
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level integrated MEMS device enabled by silicon pillar and sm...
- Patent number 10,899,608
- Issue date Jan 26, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chia Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High durability extreme ultraviolet photomask
- Patent number 10,642,148
- Issue date May 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hao Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making a light emitting device having a patterned protect...
- Patent number 10,608,142
- Issue date Mar 31, 2020
- Epistar Corporation
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer level integrated MEMS device enabled by silicon pillar and sm...
- Patent number 10,556,792
- Issue date Feb 11, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Chia Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with enhanced sensing structure and manufacturing metho...
- Patent number 10,266,396
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods of EUV mask cleaning
- Patent number 10,156,784
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- B08 - CLEANING
Information Patent Grant
High durability extreme ultraviolet photomask
- Patent number 10,061,191
- Issue date Aug 28, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hao Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light-emitting device and manufacturing method thereof
- Patent number 10,014,445
- Issue date Jul 3, 2018
- EPISTAR Corporation
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of EUV mask cleaning
- Patent number 9,885,952
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- B08 - CLEANING
Information Patent Grant
Light-emitting device
- Patent number 9,786,815
- Issue date Oct 10, 2017
- Epistar Corporation
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Damage prevention on EUV mask
- Patent number 9,740,094
- Issue date Aug 22, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Wen Lin
- B08 - CLEANING
Information Patent Grant
Method and system for EUV mask cleaning with non-thermal solution
- Patent number 9,665,000
- Issue date May 30, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- B08 - CLEANING
Information Patent Grant
Light emitting device
- Patent number 9,425,362
- Issue date Aug 23, 2016
- Epistar Corporation
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 9,422,151
- Issue date Aug 23, 2016
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lithography system and method for haze elimination
- Patent number 9,418,847
- Issue date Aug 16, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light-emitting element comprising a reflective structure with high...
- Patent number 9,240,519
- Issue date Jan 19, 2016
- Epistar Corporation
- Keng-Lin Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device manufacturing and cleaning method
- Patent number 8,932,958
- Issue date Jan 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Lun Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing and cleaning method
- Patent number 8,598,042
- Issue date Dec 3, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Lun Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIGHT-EMITTING DEVICE AND DISPLAY DEVICE HAVING THE SAME
- Publication number 20240372053
- Publication date Nov 7, 2024
- EPISTAR CORPORATION
- Hsin-Ying WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240286889
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER
- Publication number 20230399226
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
- Publication number 20230382718
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-CHUAN TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20230382719
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THEREOF
- Publication number 20220411260
- Publication date Dec 29, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-CHUAN TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220367378
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20220340407
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20220340408
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device
- Publication number 20220173292
- Publication date Jun 2, 2022
- EPISTAR CORPORATION
- Ching-Hsing SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20210327852
- Publication date Oct 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Chuan Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20210206627
- Publication date Jul 8, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20200377362
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200381366
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Durability Extreme Ultraviolet Photomask
- Publication number 20200264503
- Publication date Aug 20, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chia-Hao Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING A LIGHT EMITTING DEVICE AND LIGHT EMITTING DEVICE...
- Publication number 20200243720
- Publication date Jul 30, 2020
- EPISTAR CORPORATION
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...
- Publication number 20200024136
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Chia Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...
- Publication number 20200024137
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Chia Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...
- Publication number 20190161346
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Chia Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
High Durability Extreme Ultraviolet Photomask
- Publication number 20180373138
- Publication date Dec 27, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- CHIA-HAO YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMS DEVICE WITH ENHANCED SENSING STRUCTURE AND MANUFACTURING METHO...
- Publication number 20180339899
- Publication date Nov 29, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems and Methods of EUV Mask Cleaning
- Publication number 20180157168
- Publication date Jun 7, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MAKING A LIGHT-EMITTING DEVICE
- Publication number 20180013038
- Publication date Jan 11, 2018
- EPISTAR CORPORATION
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Durability Extreme Ultraviolet Photomask
- Publication number 20170351169
- Publication date Dec 7, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- CHIA-HAO YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20170200866
- Publication date Jul 13, 2017
- EPISTAR CORPORATION
- Jar-Yu WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for EUV Mask Cleaning with Non-Thermal Solution
- Publication number 20170139322
- Publication date May 18, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- B08 - CLEANING
Information Patent Application
Damage Prevention on EUV Mask
- Publication number 20170052443
- Publication date Feb 23, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Wen Lin
- B08 - CLEANING
Information Patent Application
Systems and Methods of EUV Mask Cleaning
- Publication number 20170031241
- Publication date Feb 2, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- B08 - CLEANING
Information Patent Application
LIGHT-EMITTING DEVICE
- Publication number 20160359088
- Publication date Dec 8, 2016
- EPISTAR CORPORATION
- Jar-Yu Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithography System And Method For Haze Elimination
- Publication number 20150212419
- Publication date Jul 30, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Wei Shen
- H01 - BASIC ELECTRIC ELEMENTS

Ching-Hsing Shen

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device

Semiconductor structure and method for forming the same

MEMS device and method for making the same

Semiconductor structure and method for manufacturing thereof

Method of forming dielectric and metal sealing layers on capping st...

Layer for buffer semiconductor device including microelectromechnic...

Method of making a light emitting device and light emitting device...

Semiconductor device and manufacturing method of semiconductor device

High durability extreme ultraviolet photomask

Wafer level integrated MEMS device enabled by silicon pillar and sm...

Semiconductor structure and manufacturing method for the same

Wafer level integrated MEMS device enabled by silicon pillar and sm...

High durability extreme ultraviolet photomask

Method of making a light emitting device having a patterned protect...

Wafer level integrated MEMS device enabled by silicon pillar and sm...

MEMS device with enhanced sensing structure and manufacturing metho...

Systems and methods of EUV mask cleaning

High durability extreme ultraviolet photomask

Light-emitting device and manufacturing method thereof

Systems and methods of EUV mask cleaning

Light-emitting device

Damage prevention on EUV mask

Method and system for EUV mask cleaning with non-thermal solution

Light emitting device

Semiconductor device and manufacturing method thereof

Lithography system and method for haze elimination

Light-emitting element comprising a reflective structure with high...

Device manufacturing and cleaning method

Device manufacturing and cleaning method

Patents Applicationslast 30 patents

LIGHT-EMITTING DEVICE AND DISPLAY DEVICE HAVING THE SAME

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THEREOF

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

MEMS DEVICE AND METHOD FOR MAKING THE SAME

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

Semiconductor Device

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

High Durability Extreme Ultraviolet Photomask

METHOD OF MAKING A LIGHT EMITTING DEVICE AND LIGHT EMITTING DEVICE...

WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...

WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...

WAFER LEVEL INTEGRATED MEMS DEVICE ENABLED BY SILICON PILLAR AND SM...

High Durability Extreme Ultraviolet Photomask

MEMS DEVICE WITH ENHANCED SENSING STRUCTURE AND MANUFACTURING METHO...

Systems and Methods of EUV Mask Cleaning

METHOD OF MAKING A LIGHT-EMITTING DEVICE

High Durability Extreme Ultraviolet Photomask

LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREOF

Method and System for EUV Mask Cleaning with Non-Thermal Solution

Damage Prevention on EUV Mask

Systems and Methods of EUV Mask Cleaning

LIGHT-EMITTING DEVICE

Lithography System And Method For Haze Elimination