Ching-Shu Lo

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Photoresist coating method
- Patent number 12,020,932
- Issue date Jun 25, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Shi Teng Zhong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing optical proximity correction for preparing mas...
- Patent number 9,256,120
- Issue date Feb 9, 2016
- United Microelectronics Corp.
- Jie Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making photomask layout and method of forming photomask i...
- Patent number 9,147,033
- Issue date Sep 29, 2015
- United Microelectronics Corp.
- Jie Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of performing optical proximity correction for preparing mas...
- Patent number 8,938,697
- Issue date Jan 20, 2015
- United Microelectronics Corp.
- Jie Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Monitoring method of exposure apparatus
- Patent number 8,233,142
- Issue date Jul 31, 2012
- United Microelectronics Corp.
- Da-Bai Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Wafer Image Equalization Method and Apparatus
- Publication number 20240221241
- Publication date Jul 4, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Qiao Lin Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY FILM STACK AND LITHOGRAPHY METHOD
- Publication number 20240201598
- Publication date Jun 20, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Ching-Shu Lo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photoresist coating method
- Publication number 20240063017
- Publication date Feb 22, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Shi Teng Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for detecting back surface of wafer
- Publication number 20240047278
- Publication date Feb 8, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Chen Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PERFORMING OPTICAL PROXIMITY CORRECTION FOR PREPARING MAS...
- Publication number 20150089460
- Publication date Mar 26, 2015
- UNITED MICROELECTRONICS CORP.
- Jie Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MAKING PHOTOMASK LAYOUT AND METHOD OF FORMING PHOTOMASK I...
- Publication number 20150074620
- Publication date Mar 12, 2015
- United Microelectronics Corp.
- Jie Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MONITORING METHOD OF EXPOSURE APPARATUS
- Publication number 20110076601
- Publication date Mar 31, 2011
- United Microelectronics Corp.
- Da-Bai Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ching-Shu Lo

Person

Patents Grantslast 30 patents

Photoresist coating method

Method of performing optical proximity correction for preparing mas...

Method of making photomask layout and method of forming photomask i...

Method of performing optical proximity correction for preparing mas...

Monitoring method of exposure apparatus

Patents Applicationslast 30 patents

Wafer Image Equalization Method and Apparatus

LITHOGRAPHY FILM STACK AND LITHOGRAPHY METHOD

Photoresist coating method

Method for detecting back surface of wafer

METHOD OF PERFORMING OPTICAL PROXIMITY CORRECTION FOR PREPARING MAS...

METHOD OF MAKING PHOTOMASK LAYOUT AND METHOD OF FORMING PHOTOMASK I...

MONITORING METHOD OF EXPOSURE APPARATUS