Ching-Yun Chang

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West Linn, OR, US

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Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...
- Publication number 20250006514
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Harish Kumar Premakumar
- B08 - CLEANING
Information Patent Application
IN-SITU CORE PROTECTION IN MULTI-PATTERNING
- Publication number 20240355624
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Nuoya Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...