Ching-Yun Chu

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Junghe, TW

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Patents Grantslast 30 patents

Information Patent Grant
Etching back process to improve topographic planarization of a poly...
- Patent number 6,645,869
- Issue date Nov 11, 2003
- Vanguard International Semiconductor Corporation
- Ching-Yun Chu
- H01 - BASIC ELECTRIC ELEMENTS