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Chirantha RODRIGO
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Santa Clara, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for improved performance in semiconductor proce...
Patent number
10,892,198
Issue date
Jan 12, 2021
Applied Materials, Inc.
Chirantha P. Rodrigo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hydrogen plasma based cleaning process for etch hardware
Patent number
10,026,597
Issue date
Jul 17, 2018
Applied Materials, Inc.
Chirantha Rodrigo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR IMPROVED PERFORMANCE IN SEMICONDUCTOR PROCE...
Publication number
20200091018
Publication date
Mar 19, 2020
Applied Materials, Inc.
Chirantha P. Rodrigo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYDROGEN PLASMA BASED CLEANING PROCESS FOR ETCH HARDWARE
Publication number
20170200590
Publication date
Jul 13, 2017
Applied Materials, Inc.
Chirantha RODRIGO
H01 - BASIC ELECTRIC ELEMENTS