TREA

Chitoshi Nogami

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  • Nara, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of cleaning a process tube
    • Patent number 5,254,176
    • Issue date Oct 19, 1993
    • Tokyo Electron Limited
    • Shigehito Ibuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...