Chiu-Ying Tai

Person

Chelmsford, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for plasma ignition in toroidal plasma sources
- Patent number 12,207,385
- Issue date Jan 21, 2025
- MKS Instruments, Inc.
- Ilya Pokidov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
- Patent number 11,733,224
- Issue date Aug 22, 2023
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
- Patent number 11,262,340
- Issue date Mar 1, 2022
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Grant
Radical output monitor for a remote plasma source and method of use
- Patent number 11,114,287
- Issue date Sep 7, 2021
- MKS Instruments, Inc.
- Michael Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of copper or trace metal contaminants in plasma electroly...
- Patent number 8,888,982
- Issue date Nov 18, 2014
- MKS Instruments Inc.
- Xing Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Terbium-dysprosium-iron magnetostrictive materials and devices usin...
- Patent number 7,179,339
- Issue date Feb 20, 2007
- Energen, Inc.
- Chiu-Ying Tai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Terbium-dysprosium-iron magnetostrictive materials and devices usin...
- Patent number 6,451,131
- Issue date Sep 17, 2002
- Energen, Inc.
- Chiu-Ying Tai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CURRENT SENSING USING EMBEDDED ELECTRODES
- Publication number 20240312772
- Publication date Sep 19, 2024
- MKS Instruments, Inc.
- Chiu-Ying Tai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PLASMA IGNITION IN TOROIDAL PLASMA SOURCES
- Publication number 20240284584
- Publication date Aug 22, 2024
- MKS Instruments, Inc.
- Ilya Pokidov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATINGS FOR USE IN REMOTE PLASMA SOURCE APPLICATIONS AND METHOD OF...
- Publication number 20230332320
- Publication date Oct 19, 2023
- MKS Instruments, Inc.
- Chiu-Ying TAI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
- Publication number 20220214321
- Publication date Jul 7, 2022
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Application
Radical Output Monitor for a Remote Plasma Source and Method of Use
- Publication number 20190385829
- Publication date Dec 19, 2019
- MKS Instruments, Inc.
- Michael Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
- Publication number 20190170715
- Publication date Jun 6, 2019
- MKS Instruments
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Application
PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS
- Publication number 20180195196
- Publication date Jul 12, 2018
- MKS Instruments, Inc.
- Chiu-Ying Tai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Reduction of Copper or Trace Metal Contaminants in Plasma Electroly...
- Publication number 20110297319
- Publication date Dec 8, 2011
- MKS Instruments, Inc.
- Xing Chen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and Apparatus for Protecting Plasma Chamber Surfaces
- Publication number 20110005922
- Publication date Jan 13, 2011
- MKS Instruments, Inc.
- Chiu-Ying Tai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Heat switch
- Publication number 20050283230
- Publication date Dec 22, 2005
- Chandrashekhar Joshi
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Tunable superconducting RF cavity
- Publication number 20050260951
- Publication date Nov 24, 2005
- Chandrashekhar H. Joshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Terbium-dysprosium-iron magnetostrictive materials and devices usin...
- Publication number 20050087265
- Publication date Apr 28, 2005
- Chiu-Ying Tai
- H01 - BASIC ELECTRIC ELEMENTS

Chiu-Ying Tai

Person

Patents Grantslast 30 patents

Method and apparatus for plasma ignition in toroidal plasma sources

Multi-sensor gas sampling detection system for radical gases and sh...

Multi-sensor gas sampling detection system for radical gases and sh...

Radical output monitor for a remote plasma source and method of use

Reduction of copper or trace metal contaminants in plasma electroly...

Terbium-dysprosium-iron magnetostrictive materials and devices usin...

Terbium-dysprosium-iron magnetostrictive materials and devices usin...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CURRENT SENSING USING EMBEDDED ELECTRODES

METHOD AND APPARATUS FOR PLASMA IGNITION IN TOROIDAL PLASMA SOURCES

COATINGS FOR USE IN REMOTE PLASMA SOURCE APPLICATIONS AND METHOD OF...

Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...

Radical Output Monitor for a Remote Plasma Source and Method of Use

Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...

PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS

Reduction of Copper or Trace Metal Contaminants in Plasma Electroly...

Methods and Apparatus for Protecting Plasma Chamber Surfaces

Heat switch

Tunable superconducting RF cavity

Terbium-dysprosium-iron magnetostrictive materials and devices usin...