Chiun-Da Shiue

Person

  • Hsinchu, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ANTI-PLASMA COATING

    • Publication number 20250149302
    • Publication date May 8, 2025
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chih-Kai Hu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

    • Publication number 20240384401
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ren-Guan Duan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

    • Publication number 20240043992
    • Publication date Feb 8, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ren-Guan Duan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...