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Hsinchu, TW
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last 30 patents
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Patent Grant
Multilayer ALD coating for critical components in process chamber
Patent number
12,049,697
Issue date
Jul 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ren-Guan Duan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
ANTI-PLASMA COATING
Publication number
20250149302
Publication date
May 8, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Kai Hu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
Publication number
20240384401
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ren-Guan Duan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
Publication number
20240043992
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ren-Guan Duan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...