Chivkula Subrahmanyam

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating a shallow trench isolation structure with red...
- Patent number 6,468,853
- Issue date Oct 22, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Palanivel Balasubramanian
- H01 - BASIC ELECTRIC ELEMENTS