Chivukula Subrahmanyam

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Linear polishing for improving substrate uniformity
- Patent number 6,726,545
- Issue date Apr 27, 2004
- Chartered Semiconductor Manufacturing Ltd.
- Subramanian Balakumar
- B24 - GRINDING POLISHING
Information Patent Grant
Method of preserving the top oxide of an ONO dielectric layer via u...
- Patent number 6,689,653
- Issue date Feb 10, 2004
- Chartered Semiconductor Manufacturing Ltd.
- Xavier Teo Leng Seah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming PLDD structure with minimized lateral dopant dif...
- Patent number 6,451,704
- Issue date Sep 17, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Yelehanka Ramachandramurthy Pradeep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming dual gate oxide
- Patent number 6,399,448
- Issue date Jun 4, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Madhusudan Mukhopadhyay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self aligned T-top gate process integration
- Patent number 6,337,262
- Issue date Jan 8, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Yelehanka Ramachandramurthy Pradeep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a T-gate for better salicidation
- Patent number 6,284,613
- Issue date Sep 4, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Chivukula Subrahmanyam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CMP uniformity
- Patent number 6,248,006
- Issue date Jun 19, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Madhusudan Mukhopadhyay
- B24 - GRINDING POLISHING
Information Patent Grant
Formation of a capacitor using a sacrificial etch stop
- Patent number 5,747,369
- Issue date May 5, 1998
- Chartered Semiconductor Manufacturing Ltd.
- Arjun Kumar Kantimahanti
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Linear polishing for improving substrate uniformity
- Publication number 20030203710
- Publication date Oct 30, 2003
- Chartered Semiconductor Manufacturing Ltd.
- Subramanian Balakumar
- B24 - GRINDING POLISHING

Chivukula Subrahmanyam

Person

Patents Grantslast 30 patents

Linear polishing for improving substrate uniformity

Method of preserving the top oxide of an ONO dielectric layer via u...

Method for forming PLDD structure with minimized lateral dopant dif...

Method for forming dual gate oxide

Self aligned T-top gate process integration

Method for forming a T-gate for better salicidation

CMP uniformity

Formation of a capacitor using a sacrificial etch stop

Patents Applicationslast 30 patents

Linear polishing for improving substrate uniformity