Chiwoei Wayne Lo

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for multiple charged particle beams
- Patent number 7,262,418
- Issue date Aug 28, 2007
- Applied Materials, Inc.
- Chiwoei Wayne Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of defects in patterned substrates
- Patent number 7,253,645
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Christopher G. Talbot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for multiple charged particle beams
- Patent number 7,067,809
- Issue date Jun 27, 2006
- Applied Materials, Inc.
- Chiwoei Wayne Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of defects in patterned substrates
- Patent number 6,914,441
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Christopher G. Talbot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Voltage contrast method and apparatus for semiconductor inspection...
- Patent number 6,566,897
- Issue date May 20, 2003
- Applied Materials, Inc.
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING
Information Patent Grant
Feature-based defect detection
- Patent number 6,539,106
- Issue date Mar 25, 2003
- Applied Materials, Inc.
- Harry S. Gallarda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for detecting defects in patterned substrates
- Patent number 6,509,750
- Issue date Jan 21, 2003
- Applied Materials, Inc.
- Christopher G. Talbot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for testing semiconductor and integrated circ...
- Patent number 6,504,393
- Issue date Jan 7, 2003
- Applied Materials, Inc.
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING
Information Patent Grant
Voltage contrast method for semiconductor inspection using low volt...
- Patent number 6,344,750
- Issue date Feb 5, 2002
- Schlumberger Technologies, Inc.
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting defects in patterned substrates
- Patent number 6,252,412
- Issue date Jun 26, 2001
- Schlumberger Technologies, Inc.
- Christopher G. Talbot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Stage for charged particle microscopy system
- Patent number 6,252,705
- Issue date Jun 26, 2001
- Schlumberger Technologies, Inc.
- Chiwoei Wayne Lo
- G12 - INSTRUMENT DETAILS
Information Patent Grant
Microstructure defect detection
- Patent number 6,232,787
- Issue date May 15, 2001
- Schlumberger Technologies, Inc.
- Chiwoei Wayne Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting defects in wafers
- Patent number 6,091,249
- Issue date Jul 18, 2000
- Schlumberger Technologies, Inc.
- Christopher Graham Talbot
- G01 - MEASURING TESTING
Information Patent Grant
Optical system
- Patent number 5,920,073
- Issue date Jul 6, 1999
- Schlumberger Technologies, Inc.
- Chiwoei Wayne Lo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for multiple charged particle beams
- Publication number 20060108531
- Publication date May 25, 2006
- Chiwoei Wayne Lo
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and apparatus for multiple charged particle beams
- Publication number 20050230633
- Publication date Oct 20, 2005
- Chiwoei Wayne Lo
- B82 - NANO-TECHNOLOGY
Information Patent Application
Detection of defects in patterned substrates
- Publication number 20050200841
- Publication date Sep 15, 2005
- APPLIED MATERIALS, INC.
- Christopher G. Talbot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Detection of defects in patterned substrates
- Publication number 20020166964
- Publication date Nov 14, 2002
- Christopher G. Talbot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Voltage contrast method and apparatus for semiconductor inspection...
- Publication number 20020149381
- Publication date Oct 17, 2002
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING

Chiwoei Wayne Lo

Person

Patents Grantslast 30 patents

Method and apparatus for multiple charged particle beams

Detection of defects in patterned substrates

Method and apparatus for multiple charged particle beams

Detection of defects in patterned substrates

Voltage contrast method and apparatus for semiconductor inspection...

Feature-based defect detection

Apparatus for detecting defects in patterned substrates

Methods and apparatus for testing semiconductor and integrated circ...

Voltage contrast method for semiconductor inspection using low volt...

Method of detecting defects in patterned substrates

Stage for charged particle microscopy system

Microstructure defect detection

Method and apparatus for detecting defects in wafers

Optical system

Patents Applicationslast 30 patents

Method and apparatus for multiple charged particle beams

Method and apparatus for multiple charged particle beams

Detection of defects in patterned substrates

Detection of defects in patterned substrates

Voltage contrast method and apparatus for semiconductor inspection...