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Chiyan KUAN
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Danville, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System for inspecting and grounding a mask in a charged particle sy...
Patent number
12,142,451
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Tianming Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting an EUV mask
Patent number
11,662,323
Issue date
May 30, 2023
ASML Netherlands B.V.
Guochong Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam inspection of ungrounded samples
Patent number
11,448,607
Issue date
Sep 20, 2022
ASML Netherlands B.V.
Chiyan Kuan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro LED display panel
Patent number
11,366,153
Issue date
Jun 21, 2022
KKT HOLDINGS SYNDICATE
Tzu-Yi Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting an EUV mask
Patent number
10,775,325
Issue date
Sep 15, 2020
ASML Netherlands B.V.
Guochong Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting an EUV mask
Patent number
10,088,438
Issue date
Oct 2, 2018
Hermes-Microvision, Inc.
Guochong Weng
G01 - MEASURING TESTING
Information
Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
Patent number
10,054,556
Issue date
Aug 21, 2018
Hermes Microvision Inc.
You-Jin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting and grounding an EUV mask
Patent number
9,859,089
Issue date
Jan 2, 2018
Hermes Microvision Inc.
Guochong Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
Patent number
9,572,237
Issue date
Feb 14, 2017
Hermes Microvision Inc.
You-Jin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting an EUV mask
Patent number
9,485,846
Issue date
Nov 1, 2016
Hermes Microvision Inc.
Guochong Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for enhancing image quality
Patent number
9,436,985
Issue date
Sep 6, 2016
Hermes Microvision Inc.
Chiyan Kuan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,177,758
Issue date
Nov 3, 2015
Hermes Microvision Inc.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle operation system
Patent number
9,164,399
Issue date
Oct 20, 2015
Hermes-Microvision, Inc.
Youjin Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Structure electron beam inspection system for inspecting extreme ul...
Patent number
9,113,538
Issue date
Aug 18, 2015
Hermes-Microvision, Inc.
You-Jin Wang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and system for enhancing image quality
Patent number
9,002,097
Issue date
Apr 7, 2015
Hermes Microvision Inc.
Chiyan Kuan
G01 - MEASURING TESTING
Information
Patent Grant
Method for inspecting EUV reticle and apparatus thereof
Patent number
8,692,193
Issue date
Apr 8, 2014
Hermes-Microvision, Inc.
Chiyan Kuan
G01 - MEASURING TESTING
Information
Patent Grant
Structure for discharging extreme ultraviolet mask
Patent number
8,575,573
Issue date
Nov 5, 2013
Hermes-Microvision, Inc.
You-Jin Wang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Charged particle system for reticle/wafer defects inspection and re...
Patent number
8,519,333
Issue date
Aug 27, 2013
Hermes Microvision Inc.
Chiyan Kuan
G01 - MEASURING TESTING
Information
Patent Grant
Substrate and die defect inspection method
Patent number
8,295,580
Issue date
Oct 23, 2012
Hermes Microvision Inc.
Chiyan Kuan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for inspecting EUV reticle and apparatus thereof
Patent number
8,217,349
Issue date
Jul 10, 2012
Hermes-Microvision, Inc.
Chiyan Kuan
G01 - MEASURING TESTING
Information
Patent Grant
Site stepping for electron beam micro analysis
Patent number
7,115,866
Issue date
Oct 3, 2006
KLA-Tencor Technologies, Inc.
Roger Kroeze
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM FOR INSPECTING AND GROUNDING A MASK IN A CHARGED PARTICLE SY...
Publication number
20230005698
Publication date
Jan 5, 2023
ASML NETHERLANDS B.V.
Tianming CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
Publication number
20210172891
Publication date
Jun 10, 2021
ASML NETHERLANDS B.V.
Guochong Weng
G01 - MEASURING TESTING
Information
Patent Application
DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PART...
Publication number
20200286710
Publication date
Sep 10, 2020
ASML NETHERLANDS B.V.
Zhong-wei CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Micro LED Display Panel
Publication number
20200225277
Publication date
Jul 16, 2020
Tzu-Yi Kuo
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM INSPECTION OF UNGROUNDED SAMPLES
Publication number
20200088657
Publication date
Mar 19, 2020
ASML Netherlands B.V.
Chiyan KUAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
Publication number
20190170671
Publication date
Jun 6, 2019
HERMES MICROVISION, INC.
Guochong Weng
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
Publication number
20170052129
Publication date
Feb 23, 2017
HERMES MICROVISION, INC.
Guochong Weng
G01 - MEASURING TESTING
Information
Patent Application
STRUCTURE ELECTRON BEAM INSPECTION SYSTEM FOR INSPECTING EXTREME UL...
Publication number
20170053774
Publication date
Feb 23, 2017
HERMES MICROVISION INC.
You-Jin WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Inspecting an EUV Mask
Publication number
20150325402
Publication date
Nov 12, 2015
HERMES MICROVISION INC.
Guochong Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE ELECTRON BEAM INSPECTION SYSTEM FOR INSPECTING EXTREME UL...
Publication number
20150305131
Publication date
Oct 22, 2015
HERMES MICROVISION INC.
You-Jin WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20150144788
Publication date
May 28, 2015
HERMES MICROVISION INC.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR INSPECTING AN EUV MASK
Publication number
20150102220
Publication date
Apr 16, 2015
HERMES MICROVISION INC.
Guoching Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK
Publication number
20140027634
Publication date
Jan 30, 2014
HERMES MICROVISION, INC.
You-Jin WANG
G01 - MEASURING TESTING
Information
Patent Application
Reticle Operation System
Publication number
20130176549
Publication date
Jul 11, 2013
Youjin Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK
Publication number
20120292509
Publication date
Nov 22, 2012
You-Jin WANG
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE SYSTEM FOR RETICLE / WAFER DEFECTS INSPECTION AND...
Publication number
20120280125
Publication date
Nov 8, 2012
HERMES MICROVISION INC.
CHIYAN KUAN
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR INSPECTING EUV RETICLE AND APPARATUS THEREOF
Publication number
20120228494
Publication date
Sep 13, 2012
Hermes-Microvision, Inc.
CHIYAN KUAN
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR INSPECTING EUV RETICLE AND APPARATUS THEREOF
Publication number
20120032076
Publication date
Feb 9, 2012
Hermes-Microvision, Inc.
CHIYAN KUAN
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE INSPECTION METHOD
Publication number
20110052040
Publication date
Mar 3, 2011
Hermes Microvision, Inc.
CHIYAN KUAN
G06 - COMPUTING CALCULATING COUNTING