Chiyu Zhu

Person

Helsinki, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for forming a semiconductor device structure and related se...
- Patent number 12,166,099
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor capsule, a vessel and a method
- Patent number 12,129,545
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 12,119,228
- Issue date Oct 15, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 12,094,686
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,908,736
- Issue date Feb 20, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for cobalt metalization
- Patent number 11,854,876
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition method to form air gaps
- Patent number 11,749,562
- Issue date Sep 5, 2023
- ASM IP Holding B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,428
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,427
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a semiconductor device structure and related se...
- Patent number 11,695,054
- Issue date Jul 4, 2023
- ASM IP Holding B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming doped metal oxide films on a substrate by cyclic...
- Patent number 11,658,030
- Issue date May 23, 2023
- ASM IP Holding B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 11,640,899
- Issue date May 2, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,581,220
- Issue date Feb 14, 2023
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 11,393,690
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,295,980
- Issue date Apr 5, 2022
- ASM IP Holding B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,770
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,769
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
NbMC layers
- Patent number 11,233,133
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 11,183,367
- Issue date Nov 23, 2021
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a semiconductor device structure and related se...
- Patent number 11,164,955
- Issue date Nov 2, 2021
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium aluminum and tantalum aluminum thin films
- Patent number 11,139,383
- Issue date Oct 5, 2021
- ASM IP Holding B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor, system including the reactor, and methods of manufacturing...
- Patent number 11,114,283
- Issue date Sep 7, 2021
- ASM IP Holding B.V.
- Tom Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition method to form air gaps
- Patent number 11,094,582
- Issue date Aug 17, 2021
- ASM IP Holding B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Layer forming method
- Patent number 11,056,344
- Issue date Jul 6, 2021
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of aluminum and nitrogen containing material
- Patent number 10,903,113
- Issue date Jan 26, 2021
- ASM IP Holding B.V.
- Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of metal borides
- Patent number 10,851,456
- Issue date Dec 1, 2020
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of aluminum and nitrogen containing material
- Patent number 10,847,361
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a semiconductor device structure and related se...
- Patent number 10,734,497
- Issue date Aug 4, 2020
- ASM IP Holding B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,534
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 10,665,425
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION METHOD
- Publication number 20240429055
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING MOLYBDENUM
- Publication number 20240218501
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING MOLYBDENUM SILICIDE
- Publication number 20240218505
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Jiyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20240153817
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SEM...
- Publication number 20240096711
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Qi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS
- Publication number 20240096633
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Elina Färm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20240026548
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230374671
- Publication date Nov 23, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SELECTIVE DEPOSITION METHOD TO FORM AIR GAPS
- Publication number 20230360964
- Publication date Nov 9, 2023
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
- Publication number 20230352556
- Publication date Nov 2, 2023
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...
- Publication number 20230260784
- Publication date Aug 17, 2023
- ASM IP HOLDING B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230253182
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR SEMICONDUCTOR SUBSTRATE PROCESSING
- Publication number 20230212740
- Publication date Jul 6, 2023
- ASM IP HOLDING, B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20220328318
- Publication date Oct 13, 2022
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20220216105
- Publication date Jul 7, 2022
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR CAPSULE, A VESSEL AND A METHOD
- Publication number 20220195595
- Publication date Jun 23, 2022
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119961
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119962
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING A SURFACE
- Publication number 20220068634
- Publication date Mar 3, 2022
- ASM IP HOLDING B.V.
- Shaoren Deng
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220051872
- Publication date Feb 17, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
- Publication number 20210399111
- Publication date Dec 23, 2021
- ASM IP HOLDING B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
- Publication number 20210391440
- Publication date Dec 16, 2021
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHODS OF MANUFACTURING...
- Publication number 20210358721
- Publication date Nov 18, 2021
- ASM IP HOLDING B.V.
- Tom Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION METHOD TO FORM AIR GAPS
- Publication number 20210343580
- Publication date Nov 4, 2021
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER FORMING METHOD
- Publication number 20210313182
- Publication date Oct 7, 2021
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION METHOD
- Publication number 20210233772
- Publication date Jul 29, 2021
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR COBALT METALIZATION
- Publication number 20210193515
- Publication date Jun 24, 2021
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20210151352
- Publication date May 20, 2021
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
- Publication number 20200343358
- Publication date Oct 29, 2020
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF ALUMINUM AND NITROGEN CONTAINING MATERIAL
- Publication number 20200343089
- Publication date Oct 29, 2020
- ASM IP HOLDING B.V.
- Han Wang
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Methods for forming a semiconductor device structure and related se...

Precursor capsule, a vessel and a method

Deposition method

Atomic layer etching processes

Methods for depositing a molybdenum metal film over a dielectric su...

Systems and methods for cobalt metalization

Selective deposition method to form air gaps

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Methods for forming a semiconductor device structure and related se...

Method for forming doped metal oxide films on a substrate by cyclic...

Atomic layer etching processes

Methods for depositing a molybdenum metal film over a dielectric su...

Deposition method

Methods for depositing a molybdenum metal film over a dielectric su...

Thermal atomic layer etching processes

Thermal atomic layer etching processes

NbMC layers

Atomic layer etching processes

Methods for forming a semiconductor device structure and related se...

Titanium aluminum and tantalum aluminum thin films

Reactor, system including the reactor, and methods of manufacturing...

Selective deposition method to form air gaps

Layer forming method

Selective deposition of aluminum and nitrogen containing material

Deposition of metal borides

Selective deposition of aluminum and nitrogen containing material

Methods for forming a semiconductor device structure and related se...

Thermal atomic layer etching processes

Atomic layer etching processes

Patents Applicationslast 30 patents

DEPOSITION METHOD

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING MOLYBDENUM

METHOD OF FORMING MOLYBDENUM SILICIDE

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

METHOD FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SEM...

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

SELECTIVE DEPOSITION METHOD TO FORM AIR GAPS

METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...

METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...

ATOMIC LAYER ETCHING PROCESSES

METHODS AND SYSTEMS FOR SEMICONDUCTOR SUBSTRATE PROCESSING

DEPOSITION METHOD

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

PRECURSOR CAPSULE, A VESSEL AND A METHOD

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

METHOD OF CLEANING A SURFACE

ATOMIC LAYER ETCHING PROCESSES

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...

REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHODS OF MANUFACTURING...

SELECTIVE DEPOSITION METHOD TO FORM AIR GAPS

LAYER FORMING METHOD

DEPOSITION METHOD

SYSTEMS AND METHODS FOR COBALT METALIZATION

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...

SELECTIVE DEPOSITION OF ALUMINUM AND NITROGEN CONTAINING MATERIAL