Chle Shishido

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for measuring three dimensional shape of a fine pattern
- Patent number 7,483,560
- Issue date Jan 27, 2009
- Hitachi High-Technologies Corporation
- Chle Shishido
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Method for measuring three dimensional shape of a fine pattern
- Publication number 20050100205
- Publication date May 12, 2005
- Chle Shishido
- G06 - COMPUTING CALCULATING COUNTING