Chloe Baldasseroni

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestals for modulating film properties in atomic layer deposition...
- Patent number 12,110,586
- Issue date Oct 8, 2024
- Lam Research Corporation
- Adrien Lavoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulated atomic layer deposition
- Patent number 12,040,181
- Issue date Jul 16, 2024
- Lam Research Corporation
- Chan Myae Myae Soe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fill on demand ampoule refill
- Patent number 11,959,175
- Issue date Apr 16, 2024
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 11,443,975
- Issue date Sep 13, 2022
- Lam Research Corporation
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thickness compensation by modulation of number of deposition cycles...
- Patent number 11,286,560
- Issue date Mar 29, 2022
- Lam Research Corporation
- Richard Phillips
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fill on demand ampoule refill
- Patent number 11,072,860
- Issue date Jul 27, 2021
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thickness compensation by modulation of number of deposition cycles...
- Patent number 10,697,059
- Issue date Jun 30, 2020
- Lam Research Corporation
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing backside deposition at wafer edge
- Patent number 10,648,079
- Issue date May 12, 2020
- Lam Research Corporation
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for tilting a wafer for achieving deposition un...
- Patent number 10,541,117
- Issue date Jan 21, 2020
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,526,700
- Issue date Jan 7, 2020
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for showerhead backside parasitic plasma su...
- Patent number 10,407,773
- Issue date Sep 10, 2019
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 10,323,323
- Issue date Jun 18, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high modulus ALD SiO2 spacer
- Patent number 10,134,579
- Issue date Nov 20, 2018
- Lam Research Corporation
- Chloe Baldasseroni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,100,407
- Issue date Oct 16, 2018
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for vapor delivery in a substrate processing sy...
- Patent number 9,970,108
- Issue date May 15, 2018
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve manifold deadleg elimination via reentrant flow path
- Patent number 9,920,844
- Issue date Mar 20, 2018
- Lam Research Corporation
- Karl Leeser
- B08 - CLEANING
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 9,793,096
- Issue date Oct 17, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer centering in pocket to improve azimuthal thickness uniformity...
- Patent number 9,698,042
- Issue date Jul 4, 2017
- Lam Research Corporation
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 9,631,276
- Issue date Apr 25, 2017
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for RF compensation in plasma assisted atomic layer deposition
- Patent number 9,624,578
- Issue date Apr 18, 2017
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for showerhead backside parasitic plasma su...
- Patent number 9,617,638
- Issue date Apr 11, 2017
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition-matched curtain gas mixtures for edge uniformity modula...
- Patent number 9,508,547
- Issue date Nov 29, 2016
- Lam Research Corporation
- Frank L. Pasquale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for backside deposition reduction by control o...
- Patent number 9,428,833
- Issue date Aug 30, 2016
- Lam Research Corporation
- Andrew Duvall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20250062150
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Patrick Girard Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20250019825
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATED ATOMIC LAYER DEPOSITION
- Publication number 20240332007
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Chan Myae Myae Soe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILL ON DEMAND AMPOULE REFILL
- Publication number 20240218515
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATED ATOMIC LAYER DEPOSITION
- Publication number 20220208543
- Publication date Jun 30, 2022
- LAM RESEARCH CORPORATION
- Chan Myae Myae Soe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20220162749
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILL ON DEMAND AMPOULE REFILL
- Publication number 20210324521
- Publication date Oct 21, 2021
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20210013080
- Publication date Jan 14, 2021
- LAM RESEARCH CORPORATION
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THICKNESS COMPENSATION BY MODULATION OF NUMBER OF DEPOSITION CYCLES...
- Publication number 20200299838
- Publication date Sep 24, 2020
- LAM RESEARCH CORPORATION
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THICKNESS COMPENSATION BY MODULATION OF NUMBER OF DEPOSITION CYCLES...
- Publication number 20190085448
- Publication date Mar 21, 2019
- LAM RESEARCH CORPORATION
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT
- Publication number 20190040528
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer Edge Contact Hardware and Methods to Eliminate Deposition at...
- Publication number 20180334746
- Publication date Nov 22, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR HIGH MODULUS ALD SIO2 SPACER
- Publication number 20180138036
- Publication date May 17, 2018
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20180122685
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...
- Publication number 20170175269
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SU...
- Publication number 20170167017
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems And Methods For Tilting A Wafer For Achieving Deposition Un...
- Publication number 20170121819
- Publication date May 4, 2017
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...
- Publication number 20170016115
- Publication date Jan 19, 2017
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...
- Publication number 20160340782
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT
- Publication number 20160177443
- Publication date Jun 23, 2016
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCING BACKSIDE DEPOSITION AT WAFER EDGE
- Publication number 20160177444
- Publication date Jun 23, 2016
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH
- Publication number 20160147234
- Publication date May 26, 2016
- LAM RESEARCH CORPORATION
- Karl Leeser
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...
- Publication number 20160090650
- Publication date Mar 31, 2016
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Suppressing Parasitic Plasma and Reducing W...
- Publication number 20160079036
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...
- Publication number 20160056032
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILL ON DEMAND AMPOULE
- Publication number 20160052651
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Chloe Baldasseroni

Person

Patents Grantslast 30 patents

Electrostatic chuck with seal surface

Pedestals for modulating film properties in atomic layer deposition...

Modulated atomic layer deposition

Fill on demand ampoule refill

Planar substrate edge contact with open volume equalization pathway...

Thickness compensation by modulation of number of deposition cycles...

Systems and methods for suppressing parasitic plasma and reducing w...

Fill on demand ampoule refill

Thickness compensation by modulation of number of deposition cycles...

Systems and methods for suppressing parasitic plasma and reducing w...

Reducing backside deposition at wafer edge

Planar substrate edge contact with open volume equalization pathway...

Systems and methods for tilting a wafer for achieving deposition un...

Hardware and process for film uniformity improvement

Methods and apparatuses for showerhead backside parasitic plasma su...

Low volume showerhead with faceplate holes for improved flow unifor...

Systems and methods enabling low defect processing via controlled s...

Method for high modulus ALD SiO2 spacer

Hardware and process for film uniformity improvement

Systems and methods for vapor delivery in a substrate processing sy...

Valve manifold deadleg elimination via reentrant flow path

Systems and methods for suppressing parasitic plasma and reducing w...

Wafer centering in pocket to improve azimuthal thickness uniformity...

Systems and methods enabling low defect processing via controlled s...

Method for RF compensation in plasma assisted atomic layer deposition

Methods and apparatuses for showerhead backside parasitic plasma su...

Composition-matched curtain gas mixtures for edge uniformity modula...

Method and apparatus for backside deposition reduction by control o...

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK WITH SEAL SURFACE

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

MODULATED ATOMIC LAYER DEPOSITION

FILL ON DEMAND AMPOULE REFILL

MODULATED ATOMIC LAYER DEPOSITION

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

FILL ON DEMAND AMPOULE REFILL

ELECTROSTATIC CHUCK WITH SEAL SURFACE

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

THICKNESS COMPENSATION BY MODULATION OF NUMBER OF DEPOSITION CYCLES...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

THICKNESS COMPENSATION BY MODULATION OF NUMBER OF DEPOSITION CYCLES...

HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT

Wafer Edge Contact Hardware and Methods to Eliminate Deposition at...

METHOD FOR HIGH MODULUS ALD SIO2 SPACER

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...

METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SU...

Systems And Methods For Tilting A Wafer For Achieving Deposition Un...

SYSTEMS AND METHODS ENABLING LOW DEFECT PROCESSING VIA CONTROLLED S...

LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...

HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT

REDUCING BACKSIDE DEPOSITION AT WAFER EDGE

VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH

METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...

Systems and Methods for Suppressing Parasitic Plasma and Reducing W...

METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...

FILL ON DEMAND AMPOULE