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Cho-Chin Chen
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Tainan, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Slurry dispensing system
Patent number
7,392,818
Issue date
Jul 1, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Tzung Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Wet dip method for photoresist and polymer stripping without buffer...
Patent number
6,652,666
Issue date
Nov 25, 2003
Taiwan Semiconductor Manufacturing Co. Ltd
Ching-Tien Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for drying wafers by a solvent
Patent number
6,401,361
Issue date
Jun 11, 2002
Taiwan Semiconductor Manufacturing Co., Ltd
Cho-Ching Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SLURRY DISPENSING SYSTEM
Publication number
20080017249
Publication date
Jan 24, 2008
Taiwan Semiconductor Manufacturing Co., LTD
Ming-Tzung Hsu
B24 - GRINDING POLISHING
Information
Patent Application
Shower tubing for PRS wet bench
Publication number
20030221712
Publication date
Dec 4, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Shin-Shing Yang
B08 - CLEANING
Information
Patent Application
Wet dip method for photoresist and polymer stripping without buffer...
Publication number
20020162578
Publication date
Nov 7, 2002
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Tien Ma
H01 - BASIC ELECTRIC ELEMENTS