Choi Pheng Soo

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Patents Grantslast 30 patents

Information Patent Grant
Simplified dual damascene process utilizing PPMSO as an insulator l...
- Patent number 6,323,125
- Issue date Nov 27, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Choi Pheng Soo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of air gap structures for inter-metal dielectric application
- Patent number 6,251,798
- Issue date Jun 26, 2001
- Chartered Semiconductor Manufacturing Company
- Choi Pheng Soo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to enhance global planarization of silicon oxide surface for...
- Patent number 6,221,560
- Issue date Apr 24, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Choi Pheng Soo
- H01 - BASIC ELECTRIC ELEMENTS