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Chon-Yai Tasi
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Yungkang City, TW
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last 30 patents
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Patent Grant
Convex insert ring for etch chamber
Patent number
7,381,293
Issue date
Jun 3, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Yi Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Convex insert ring for etch chamber
Publication number
20040134617
Publication date
Jul 15, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Yi Wang
H01 - BASIC ELECTRIC ELEMENTS