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Chong Hwan Chu
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Pleasanton, CA, US
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last 30 patents
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Patent Grant
Treatment and evaluation of a substrate processing chamber
Patent number
6,783,626
Issue date
Aug 31, 2004
Nam-Hun Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Treatment and evaluation of a substrate processing chamber
Publication number
20030052083
Publication date
Mar 20, 2003
Nam-Hun Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...