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Baoshan Township, TW
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Patent Grant
Fabrication of ultra-shallow junctions
Patent number
9,202,693
Issue date
Dec 1, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Li-Ting Wang
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
FABRICATION OF ULTRA-SHALLOW JUNCTIONS
Publication number
20140213047
Publication date
Jul 31, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Li-Ting WANG
H01 - BASIC ELECTRIC ELEMENTS