Chongying Xu

Person

Milford, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Solid precursor-based delivery of fluid utilizing controlled solids...
- Patent number 10,895,010
- Issue date Jan 19, 2021
- Entegris, Inc.
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor compositions for atomic layer deposition and chemical vap...
- Patent number 9,534,285
- Issue date Jan 3, 2017
- Entegris, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tellurium compounds useful for deposition of tellurium containing m...
- Patent number 9,537,095
- Issue date Jan 3, 2017
- Entegris, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doping of ZrO2 for DRAM applications
- Patent number 9,373,677
- Issue date Jun 21, 2016
- Entegris, Inc.
- Julie Cissell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors for silicon dioxide gap fill
- Patent number 9,337,054
- Issue date May 10, 2016
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster ion implantation of arsenic and phosphorus
- Patent number 9,269,582
- Issue date Feb 23, 2016
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and method for low temperature chemical vapor depositio...
- Patent number 9,102,693
- Issue date Aug 11, 2015
- Entegris, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Antimony compounds useful for deposition of antimony-containing mat...
- Patent number 9,034,688
- Issue date May 19, 2015
- Entegris, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,877,549
- Issue date Nov 4, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid precursor-based delivery of fluid utilizing controlled solids...
- Patent number 8,821,640
- Issue date Sep 2, 2014
- Advanced Technology Materials, Inc.
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and method for low temperature chemical vapor depositio...
- Patent number 8,802,882
- Issue date Aug 12, 2014
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Tellurium compounds useful for deposition of tellurium containing m...
- Patent number 8,796,068
- Issue date Aug 5, 2014
- Advanced Technology Materials, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor compositions for atomic layer deposition and chemical vap...
- Patent number 8,784,936
- Issue date Jul 22, 2014
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 8,709,863
- Issue date Apr 29, 2014
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,679,894
- Issue date Mar 25, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony compounds useful for deposition of antimony-containing mat...
- Patent number 8,674,127
- Issue date Mar 18, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ generation of RuO4 for ALD of Ru and Ru related materials
- Patent number 8,663,735
- Issue date Mar 4, 2014
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and composition for depositing ruthenium with assistive meta...
- Patent number 8,574,675
- Issue date Nov 5, 2013
- Advanced Technology Materials, Inc.
- Jorge A. Lubguban
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monosilane or disilane derivatives and method for low temperature d...
- Patent number 8,541,318
- Issue date Sep 24, 2013
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Precursor compositions for ALD/CVD of group II ruthenate thin films
- Patent number 8,524,931
- Issue date Sep 3, 2013
- Advanced Technology Materials, Inc.
- Chongying Xu
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Strontium precursor for use in chemical vapor deposition, atomic la...
- Patent number 8,455,049
- Issue date Jun 4, 2013
- Advanced Technology Materials, Inc.
- Thomas M. Cameron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,288,198
- Issue date Oct 16, 2012
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 8,268,665
- Issue date Sep 18, 2012
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monosilane or disilane derivatives and method for low temperature d...
- Patent number 8,242,032
- Issue date Aug 14, 2012
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Chemical vapor deposition of high conductivity, adherent thin films...
- Patent number 8,241,704
- Issue date Aug 14, 2012
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and method for low temperature deposition of silicon-co...
- Patent number 8,236,097
- Issue date Aug 7, 2012
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor compositions for atomic layer deposition and chemical vap...
- Patent number 8,206,784
- Issue date Jun 26, 2012
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for CVD/ALD of metal-containing films
- Patent number 8,168,811
- Issue date May 1, 2012
- Advanced Technology Materials, Inc.
- Thomas M. Cameron
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Composition and method for low temperature deposition of silicon-co...
- Patent number 8,153,833
- Issue date Apr 10, 2012
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous Ge/Te deposition process
- Patent number 8,093,140
- Issue date Jan 10, 2012
- Advanced Technology Materials, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS...
- Publication number 20170037511
- Publication date Feb 9, 2017
- Entegris, Inc.
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20140329357
- Publication date Nov 6, 2014
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS...
- Publication number 20140329025
- Publication date Nov 6, 2014
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
- Publication number 20140329011
- Publication date Nov 6, 2014
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAP...
- Publication number 20140295071
- Publication date Oct 2, 2014
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20140220733
- Publication date Aug 7, 2014
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
- Publication number 20140206134
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...
- Publication number 20140206136
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER ION IMPLANTATION OF ARSENIC AND PHOSPHORUS
- Publication number 20140011346
- Publication date Jan 9, 2014
- Advanced Technology Materials, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20130288462
- Publication date Oct 31, 2013
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRONTIUM AND BARIUM PRECURSORS FOR USE IN CHEMICAL VAPOR DEPOSITIO...
- Publication number 20130251918
- Publication date Sep 26, 2013
- Advanced Technology Materials, Inc.
- Thomas M. Cameron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPING OF ZrO2 FOR DRAM APPLICATIONS
- Publication number 20130122722
- Publication date May 16, 2013
- Advanced Technology Materials, Inc.
- Julie Cissell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20130029456
- Publication date Jan 31, 2013
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
- Publication number 20130005078
- Publication date Jan 3, 2013
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ZIRCONIUM, HAFNIUM AND TITANIUM PRECURSORS FOR ATOMIC LAYER DEPOSIT...
- Publication number 20120196449
- Publication date Aug 2, 2012
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
- Publication number 20120178267
- Publication date Jul 12, 2012
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...
- Publication number 20120156894
- Publication date Jun 21, 2012
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAP...
- Publication number 20120141675
- Publication date Jun 7, 2012
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES
- Publication number 20120127629
- Publication date May 24, 2012
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
AMORPHOUS GE/TE DEPOSITION PROCESS
- Publication number 20120108038
- Publication date May 3, 2012
- Advanced Technology Materials, Inc.
- Philip S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND COMPOSITION FOR DEPOSITING RUTHENIUM WITH ASSISTIVE META...
- Publication number 20120064719
- Publication date Mar 15, 2012
- Advanced Technology Materials, Inc.
- Jorge A. Lubguban, JR.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20110263100
- Publication date Oct 27, 2011
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION OF HIGH CONDUCTIVITY, ADHERENT THIN FILMS...
- Publication number 20110195188
- Publication date Aug 11, 2011
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
- Publication number 20110183528
- Publication date Jul 28, 2011
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...
- Publication number 20110165762
- Publication date Jul 7, 2011
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
- Publication number 20110136343
- Publication date Jun 9, 2011
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...
- Publication number 20110111556
- Publication date May 12, 2011
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL AMINOTROPONIMINATES, BIS-OXAZOLINATES AND GUANIDINATES
- Publication number 20110060165
- Publication date Mar 10, 2011
- Advanced Technology Materials, Inc.
- Thomas M. Cameron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
- Publication number 20100314590
- Publication date Dec 16, 2010
- Advanced Technology Materials, Inc.
- Ziyun WANG
- C07 - ORGANIC CHEMISTRY
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20100317150
- Publication date Dec 16, 2010
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Chongying Xu

Person

Patents Grantslast 30 patents

Solid precursor-based delivery of fluid utilizing controlled solids...

Precursor compositions for atomic layer deposition and chemical vap...

Tellurium compounds useful for deposition of tellurium containing m...

Doping of ZrO2 for DRAM applications

Precursors for silicon dioxide gap fill

Cluster ion implantation of arsenic and phosphorus

Composition and method for low temperature chemical vapor depositio...

Antimony compounds useful for deposition of antimony-containing mat...

Low temperature deposition of phase change memory materials

Solid precursor-based delivery of fluid utilizing controlled solids...

Composition and method for low temperature chemical vapor depositio...

Tellurium compounds useful for deposition of tellurium containing m...

Precursor compositions for atomic layer deposition and chemical vap...

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Low temperature deposition of phase change memory materials

Antimony compounds useful for deposition of antimony-containing mat...

In situ generation of RuO4 for ALD of Ru and Ru related materials

Method and composition for depositing ruthenium with assistive meta...

Monosilane or disilane derivatives and method for low temperature d...

Precursor compositions for ALD/CVD of group II ruthenate thin films

Strontium precursor for use in chemical vapor deposition, atomic la...

Low temperature deposition of phase change memory materials

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Monosilane or disilane derivatives and method for low temperature d...

Chemical vapor deposition of high conductivity, adherent thin films...

Composition and method for low temperature deposition of silicon-co...

Precursor compositions for atomic layer deposition and chemical vap...

Precursors for CVD/ALD of metal-containing films

Composition and method for low temperature deposition of silicon-co...

Amorphous Ge/Te deposition process

Patents Applicationslast 30 patents

SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS...

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS...

COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...

PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAP...

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS

ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...

CLUSTER ION IMPLANTATION OF ARSENIC AND PHOSPHORUS

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

STRONTIUM AND BARIUM PRECURSORS FOR USE IN CHEMICAL VAPOR DEPOSITIO...

DOPING OF ZrO2 FOR DRAM APPLICATIONS

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS

ZIRCONIUM, HAFNIUM AND TITANIUM PRECURSORS FOR ATOMIC LAYER DEPOSIT...

COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...

MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...

PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAP...

DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES

AMORPHOUS GE/TE DEPOSITION PROCESS

METHOD AND COMPOSITION FOR DEPOSITING RUTHENIUM WITH ASSISTIVE META...

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

CHEMICAL VAPOR DEPOSITION OF HIGH CONDUCTIVITY, ADHERENT THIN FILMS...

COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...

MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...

COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...

ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...

METAL AMINOTROPONIMINATES, BIS-OXAZOLINATES AND GUANIDINATES

COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...