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Photoresist compositions and methods
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Rohm and Haas Electronic Materials LLC
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Joshua Kaitz
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Multiple-pattern forming methods
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Dow Global Technologies LLC
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Chang-Young Hong
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Issue date Jul 11, 2017
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Rohm and Haas Electronic Materials LLC
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Jong Keun Park
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Issue date Feb 28, 2017
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Rohm and Haas Electronic Materials LLC
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Choong-Bong Lee
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