Choshoku Sai

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical device, projection optical system, exposure apparatus using...
- Patent number 10,884,236
- Issue date Jan 5, 2021
- Canon Kabushiki Kaisha
- Choshoku Sai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus, projection optical system, exposure apparatus, a...
- Patent number 9,568,729
- Issue date Feb 14, 2017
- Canon Kabushiki Kaisha
- Choshoku Sai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror unit and exposure apparatus
- Patent number 9,557,560
- Issue date Jan 31, 2017
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Grant
Optical apparatus, projection optical system, exposure apparatus, a...
- Patent number 9,465,294
- Issue date Oct 11, 2016
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Grant
Optical unit and exposure apparatus having the same
- Patent number 7,771,065
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Grant
Reflecting mirror and exposure apparatus using the same
- Patent number 7,453,623
- Issue date Nov 18, 2008
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Grant
Optical element holding apparatus, exposure apparatus and device ma...
- Patent number 7,443,619
- Issue date Oct 28, 2008
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Grant
Hydrostatic bearing and stage apparatus using same
- Patent number 7,232,257
- Issue date Jun 19, 2007
- Canon Kabushiki Kaisha
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Static gas bearing system, stage mechanism, exposure apparatus, and...
- Patent number 7,207,720
- Issue date Apr 24, 2007
- Canon Kabushiki Kaisha
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Weight compensation apparatus, stage apparatus using the same, and...
- Patent number 6,658,083
- Issue date Dec 2, 2003
- Canon Kabushiki Kaisha
- Choshoku Sai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL DEVICE, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS USING...
- Publication number 20190041631
- Publication date Feb 7, 2019
- Canon Kabushiki Kaisha
- Choshoku SAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, A...
- Publication number 20150177481
- Publication date Jun 25, 2015
- Canon Kabushiki Kaisha
- Choshoku SAI
- G02 - OPTICS
Information Patent Application
OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, A...
- Publication number 20150092172
- Publication date Apr 2, 2015
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Application
MIRROR UNIT AND EXPOSURE APPARATUS
- Publication number 20140307243
- Publication date Oct 16, 2014
- Canon Kabushiki Kaisha
- Choshoku SAI
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...
- Publication number 20070076310
- Publication date Apr 5, 2007
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Application
Reflecting mirror and exposure apparatus using the same
- Publication number 20060245035
- Publication date Nov 2, 2006
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Application
Optical unit and exposure apparatus having the same
- Publication number 20060232866
- Publication date Oct 19, 2006
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Application
Static gas bearing system, stage mechanism, exposure apparatus, and...
- Publication number 20050129339
- Publication date Jun 16, 2005
- Canon Kabushiki Kaisha
- Choshoku Sai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hydrostatic bearing, alignment apparatus, exposure apparatus, and d...
- Publication number 20050008269
- Publication date Jan 13, 2005
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hydrostatic bearing and stage apparatus using same
- Publication number 20020176061
- Publication date Nov 28, 2002
- Canon Kabushiki Kaisha
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Weight compensation apparatus, stage apparatus using the same, and...
- Publication number 20010053196
- Publication date Dec 20, 2001
- Choshoku Sai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Choshoku Sai

Person

Patents Grantslast 30 patents

Optical device, projection optical system, exposure apparatus using...

Optical apparatus, projection optical system, exposure apparatus, a...

Mirror unit and exposure apparatus

Optical apparatus, projection optical system, exposure apparatus, a...

Optical unit and exposure apparatus having the same

Reflecting mirror and exposure apparatus using the same

Optical element holding apparatus, exposure apparatus and device ma...

Hydrostatic bearing and stage apparatus using same

Static gas bearing system, stage mechanism, exposure apparatus, and...

Weight compensation apparatus, stage apparatus using the same, and...

Patents Applicationslast 30 patents

OPTICAL DEVICE, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS USING...

OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, A...

OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, A...

MIRROR UNIT AND EXPOSURE APPARATUS

OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...

Reflecting mirror and exposure apparatus using the same

Optical unit and exposure apparatus having the same

Static gas bearing system, stage mechanism, exposure apparatus, and...

Hydrostatic bearing, alignment apparatus, exposure apparatus, and d...

Hydrostatic bearing and stage apparatus using same

Weight compensation apparatus, stage apparatus using the same, and...