Chou-Feng Lee

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for cooling plasma treatment components
- Patent number 12,062,523
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng Kuang Tso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing a via fence
- Patent number 7,021,320
- Issue date Apr 4, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chou-Feng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reworking tungsten particle contaminated semiconductor wa...
- Patent number 6,746,954
- Issue date Jun 8, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chou-Feng Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS
- Publication number 20240363312
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng Kuang Tso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR DRY ETCHING
- Publication number 20240071803
- Publication date Feb 29, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Fu-Yi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL
- Publication number 20230386799
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS
- Publication number 20230260758
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Company
- Cheng Kuang Tso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL
- Publication number 20230066418
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng Chieh HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of removing a via fence
- Publication number 20040200803
- Publication date Oct 14, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chou-Feng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of reworking tungsten particle contaminated semiconductor wa...
- Publication number 20040005783
- Publication date Jan 8, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chou-Feng Lee
- H01 - BASIC ELECTRIC ELEMENTS

Chou-Feng Lee

Person

Patents Grantslast 30 patents

Methods and systems for cooling plasma treatment components

Method of removing a via fence

Method of reworking tungsten particle contaminated semiconductor wa...

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS

METHODS AND SYSTEMS FOR DRY ETCHING

FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL

METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS

FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL

Method of removing a via fence

Method of reworking tungsten particle contaminated semiconductor wa...