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Chris C. Chrobak
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San Diego, CA, US
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last 30 patents
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Patent Grant
System, method and apparatus for aligning and synchronizing target...
Patent number
8,653,491
Issue date
Feb 18, 2014
Cymer, Inc.
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
SYSTEM, METHOD AND APPARATUS FOR ALIGNING AND SYNCHRONIZING TARGET...
Publication number
20100258750
Publication date
Oct 14, 2010
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR