Chris Chang

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Corrosion resistant component of semiconductor processing equipment...
- Patent number 8,486,841
- Issue date Jul 16, 2013
- Lam Research Corporation
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Yttria-coated ceramic components of semiconductor material processi...
- Patent number 8,293,335
- Issue date Oct 23, 2012
- Lam Research Corporation
- Chris Chang
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Corrosion resistant component of semiconductor processing equipment...
- Patent number 7,605,086
- Issue date Oct 20, 2009
- Lam Research Corporation
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zirconia toughened ceramic components and coatings in semiconductor...
- Patent number 7,255,898
- Issue date Aug 14, 2007
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Yttria-coated ceramic components of semiconductor material processi...
- Patent number 7,220,497
- Issue date May 22, 2007
- Lam Research Corporation
- Chris Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant component of semiconductor processing equipment...
- Patent number 7,128,804
- Issue date Oct 31, 2006
- Lam Research Corporation
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low contamination plasma chamber components and methods for making...
- Patent number 6,805,952
- Issue date Oct 19, 2004
- Lam Research Corporation
- Christopher C. Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fullerene coated component of semiconductor processing equipment an...
- Patent number 6,790,242
- Issue date Sep 14, 2004
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron nitride/yttria composite components of semiconductor processi...
- Patent number 6,773,751
- Issue date Aug 10, 2004
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Zirconia toughened ceramic components and coatings in semiconductor...
- Patent number 6,620,520
- Issue date Sep 16, 2003
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron nitride/yttria composite components of semiconductor processi...
- Patent number 6,613,442
- Issue date Sep 2, 2003
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond coatings on reactor wall and method of manufacturing thereof
- Patent number 6,537,429
- Issue date Mar 25, 2003
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbonitride coated component of semiconductor processing equipment...
- Patent number 6,533,910
- Issue date Mar 18, 2003
- Lam Research Corporation
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant component of semiconductor processing equipment...
- Patent number 6,444,083
- Issue date Sep 3, 2002
- Lam Research Corporation
- Robert Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CORROSION RESISTANT COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT...
- Publication number 20100003826
- Publication date Jan 7, 2010
- LAM RESEARCH CORPORATION
- ROBERT J. O'DONNELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Yttria-coated ceramic components of semiconductor material processi...
- Publication number 20070166477
- Publication date Jul 19, 2007
- LAM RESEARCH CORPORATION
- Chris Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Corrosion resistant component of semiconductor processing equipment...
- Publication number 20070012657
- Publication date Jan 18, 2007
- Lam Research Corporation
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Yttria-coated ceramic components of semiconductor material processi...
- Publication number 20050136188
- Publication date Jun 23, 2005
- Chris Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low contamination plasma chamber components and methods for making...
- Publication number 20040224128
- Publication date Nov 11, 2004
- Lam Research Corporation
- Christopher C. Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON NITRIDE/YTTRIA COMPOSITE COMPONENTS OF SEMICONDUCTOR PROCESSI...
- Publication number 20040137147
- Publication date Jul 15, 2004
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Zirconia toughened ceramic components and coatings in semiconductor...
- Publication number 20040023047
- Publication date Feb 5, 2004
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Carbonitride coated component of semiconductor processing equipment...
- Publication number 20020094378
- Publication date Jul 18, 2002
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Corrosion resistant component of semiconductor processing equipment...
- Publication number 20020086545
- Publication date Jul 4, 2002
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fullerene coated component of semiconductor processing equipment an...
- Publication number 20020086553
- Publication date Jul 4, 2002
- Robert J. O'Donnell
- B82 - NANO-TECHNOLOGY
Information Patent Application
Low contamination plasma chamber components and methods for making...
- Publication number 20020086118
- Publication date Jul 4, 2002
- Christopher C. Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Diamond coatings on reactor wall and method of manufacturing thereof
- Publication number 20020086501
- Publication date Jul 4, 2002
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Boron nitride/yttria composite components of semiconductor processi...
- Publication number 20020086554
- Publication date Jul 4, 2002
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Zirconia toughened ceramic components and coatings in semiconductor...
- Publication number 20020086153
- Publication date Jul 4, 2002
- Robert J. O'Donnell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Chris Chang

Person

Patents Grantslast 30 patents

Corrosion resistant component of semiconductor processing equipment...

Yttria-coated ceramic components of semiconductor material processi...

Corrosion resistant component of semiconductor processing equipment...

Zirconia toughened ceramic components and coatings in semiconductor...

Yttria-coated ceramic components of semiconductor material processi...

Corrosion resistant component of semiconductor processing equipment...

Low contamination plasma chamber components and methods for making...

Fullerene coated component of semiconductor processing equipment an...

Boron nitride/yttria composite components of semiconductor processi...

Zirconia toughened ceramic components and coatings in semiconductor...

Boron nitride/yttria composite components of semiconductor processi...

Diamond coatings on reactor wall and method of manufacturing thereof

Carbonitride coated component of semiconductor processing equipment...

Corrosion resistant component of semiconductor processing equipment...

Patents Applicationslast 30 patents

CORROSION RESISTANT COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT...

Yttria-coated ceramic components of semiconductor material processi...

Corrosion resistant component of semiconductor processing equipment...

Yttria-coated ceramic components of semiconductor material processi...

Low contamination plasma chamber components and methods for making...

BORON NITRIDE/YTTRIA COMPOSITE COMPONENTS OF SEMICONDUCTOR PROCESSI...

Zirconia toughened ceramic components and coatings in semiconductor...

Carbonitride coated component of semiconductor processing equipment...

Corrosion resistant component of semiconductor processing equipment...

Fullerene coated component of semiconductor processing equipment an...

Low contamination plasma chamber components and methods for making...

Diamond coatings on reactor wall and method of manufacturing thereof

Boron nitride/yttria composite components of semiconductor processi...

Zirconia toughened ceramic components and coatings in semiconductor...