Chris Gage

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Closed loop temperature heat up and control utilizing wafer-to-heat...
- Patent number 8,920,162
- Issue date Dec 30, 2014
- Novellus Systems, Inc.
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock designs and methods for using same
- Patent number 8,491,248
- Issue date Jul 23, 2013
- Novellus Systems, Inc.
- Chris Gage
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
High throughput method of in transit wafer position correction in a...
- Patent number 8,489,237
- Issue date Jul 16, 2013
- Novellus Systems, Inc.
- Chris Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Minimum contact area wafer clamping with gas flow for rapid wafer c...
- Patent number 8,454,294
- Issue date Jun 4, 2013
- Novellus Systems, Inc.
- Christopher Gage
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Transferring heat in loadlocks
- Patent number 8,288,288
- Issue date Oct 16, 2012
- Novellus Systems, Inc.
- Christopher Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge removal of films using externally generated plasma species
- Patent number 8,100,081
- Issue date Jan 24, 2012
- Novellus Systems, Inc.
- Jon Henri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput method of in transit wafer position correction in s...
- Patent number 8,060,252
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- Chris Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed loop temperature heat up and control utilizing wafer-to-heat...
- Patent number 8,052,419
- Issue date Nov 8, 2011
- Novellus Systems, Inc.
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock designs and methods for using same
- Patent number 8,033,769
- Issue date Oct 11, 2011
- Novellus Systems, Inc.
- Chris Gage
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Minimum contact area wafer clamping with gas flow for rapid wafer c...
- Patent number 8,033,771
- Issue date Oct 11, 2011
- Novellus Systems, Inc.
- Christopher Gage
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR REDUCING WAFER BACKSIDE DAMAGE
- Publication number 20250167025
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES
- Publication number 20240200191
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL INCLUDING SEAL
- Publication number 20230416918
- Publication date Dec 28, 2023
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
- Publication number 20230073259
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC PEDESTAL WITH MULTI-LAYER HEATER FOR ENHANCED THERMAL UNIFO...
- Publication number 20210398829
- Publication date Dec 23, 2021
- LAM RESEARCH CORPORATION
- Christopher GAGE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT METHOD OF IN TRANSIT WAFER POSITION CORRECTION IN A...
- Publication number 20120014773
- Publication date Jan 19, 2012
- Chris Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK DESIGNS AND METHODS FOR USING SAME
- Publication number 20120003063
- Publication date Jan 5, 2012
- Chris Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIMUM CONTACT AREA WAFER CLAMPING WITH GAS FLOW FOR RAPID WAFER C...
- Publication number 20110318142
- Publication date Dec 29, 2011
- Christopher Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High throughput method of in transit wafer position correction in s...
- Publication number 20090143911
- Publication date Jun 4, 2009
- Novellus Systems, Inc.
- Chris Gage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Loadlock designs and methods for using same
- Publication number 20090142167
- Publication date Jun 4, 2009
- Novellus Systems, Inc.
- Chris Gage
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Closed loop temperature heat up and control utilizing wafer-to-heat...

Loadlock designs and methods for using same

High throughput method of in transit wafer position correction in a...

Minimum contact area wafer clamping with gas flow for rapid wafer c...

Transferring heat in loadlocks

Edge removal of films using externally generated plasma species

High throughput method of in transit wafer position correction in s...

Closed loop temperature heat up and control utilizing wafer-to-heat...

Loadlock designs and methods for using same

Minimum contact area wafer clamping with gas flow for rapid wafer c...

Patents Applicationslast 30 patents

APPARATUS AND METHODS FOR REDUCING WAFER BACKSIDE DAMAGE

BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES

PEDESTAL INCLUDING SEAL

HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER

CERAMIC PEDESTAL WITH MULTI-LAYER HEATER FOR ENHANCED THERMAL UNIFO...

HIGH THROUGHPUT METHOD OF IN TRANSIT WAFER POSITION CORRECTION IN A...

LOADLOCK DESIGNS AND METHODS FOR USING SAME

MINIMUM CONTACT AREA WAFER CLAMPING WITH GAS FLOW FOR RAPID WAFER C...

High throughput method of in transit wafer position correction in s...

Loadlock designs and methods for using same