Chris L. Koliopoulos

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Tucson, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Equal-path interferometer
- Patent number 8,045,175
- Issue date Oct 25, 2011
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
System and method for controlling a beam source in a workpiece surf...
- Patent number 7,839,495
- Issue date Nov 23, 2010
- KLA-Tencor Corporation
- Bruce Baran
- G01 - MEASURING TESTING
Information Patent Grant
System and method for controlling a beam source in a workpiece surf...
- Patent number 7,557,910
- Issue date Jul 7, 2009
- KLA-Tencor Corporation
- Bruce Baran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Compliant pad wafer chuck
- Patent number 7,541,826
- Issue date Jun 2, 2009
- KLA-Tencor Corporation
- Chris L. Koliopoulos
- G01 - MEASURING TESTING
Information Patent Grant
Method, system, and software for evaluating characteristics of a su...
- Patent number 7,324,917
- Issue date Jan 29, 2008
- KLA-Tencor Technologies Corporation
- Chris L. Koliopoulos
- G01 - MEASURING TESTING
Information Patent Grant
Sheet flatness measurement system and method
- Patent number 5,471,307
- Issue date Nov 28, 1995
- Phase Shift Technology, Inc.
- Chris L. Koliopoulos
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL DEFECT INSPECTION SYSTEM
- Publication number 20140268105
- Publication date Sep 18, 2014
- Zygo Corporation
- Richard Earl Bills
- G02 - OPTICS
Information Patent Application
Equal-Path Interferometer
- Publication number 20110007323
- Publication date Jan 13, 2011
- Zygo Corporation
- Peter J. De Groot
- G02 - OPTICS
Information Patent Application
System and Method for Controlling a Beam Source in a Workpiece Surf...
- Publication number 20100149527
- Publication date Jun 17, 2010
- KLA-Tencor Corporation
- Bruce Baran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for controlling a beam source in a workpiece surf...
- Publication number 20070252977
- Publication date Nov 1, 2007
- Bruce Baran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Compliant pad wafer chuck
- Publication number 20060255819
- Publication date Nov 16, 2006
- Phase Shift Technology, Inc.
- Chris L. Koliopoulos
- G01 - MEASURING TESTING
Information Patent Application
Method, system, and software for evaluating characteristics of a su...
- Publication number 20060004542
- Publication date Jan 5, 2006
- Chris L. Koliopoulos
- G01 - MEASURING TESTING