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Chris Lee
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Enschede, NL
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Patents Grants
last 30 patents
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Patent Grant
Radiation modulator for a lithography apparatus, a lithography appa...
Patent number
9,823,576
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Dries Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
RADIATION MODULATOR FOR A LITHOGRAPHY APPARATUS, A LITHOGRAPHY APPA...
Publication number
20140211189
Publication date
Jul 31, 2014
ASML NETHERLANDS B.V.
Dries SMEETS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY